GAZI UNIVERSITY INFORMATION PACKAGE - 2019 ACADEMIC YEAR

COURSE DESCRIPTION

MICRO AND NANOPATTERNING TECHNIQUES/5441328

Course Title:	MICRO AND NANOPATTERNING TECHNIQUES
Credits	3	ECTS	7.5
Semester	1	Compulsory/Elective	Elective

COURSE INFO

-- LANGUAGE OF INSTRUCTION

Turkish

-- NAME OF LECTURER(S)

Professor Elif Orhan

-- WEB SITE(S) OF LECTURER(S)

http://websitem.gazi.edu.tr/site/eliforhan

-- EMAIL(S) OF LECTURER(S)

eliforhan@gazi.edu.tr

-- LEARNING OUTCOMES OF THE COURSE UNIT

Ability to use technical /modern materials to be required in her/his works
Ability to present oral and written forms in her/his field
Ability to work on interdisciplinary studies
Ability to rapidly distinguish the true an required knowledge
Ability to do analyze of results

-- MODE OF DELIVERY

Face to face

-- PREREQUISITES AND CO-REQUISITES

There is no prerequisite for this course

-- RECOMMENDED OPTIONAL PROGRAMME COMPONENTS

There is no recommended optional programme component for this cours.

--COURSE CONTENT
1. Week	Introduction to Nanosystems and Nanodevices: Fabrication from micro- to nanotechnology
2. Week	Introduction to Nanosystems and Nanodevices: Fabrication from micro- to nanotechnology
3. Week	Photolithography
4. Week	Photomask technology
5. Week	Soft lithography, nanoimprint method
6. Week	Interference lithography
7. Week	Midterm Exam
8. Week	Immersion lithography
9. Week	E-beam lithography
10. Week	Nano-templates by FIB (Focus Ion Beam)
11. Week	X-ray lithography
12. Week	Plasmon lithography
13. Week	Nano-fabrication by self-assembly
14. Week	Direct writing lithography,Dip-pen nanolithography
15. Week	A unique example on nano-fabrication: Nano-fabrication processes for integrated circuit technology
16. Week	A unique example on nano-fabrication: Nano-fabrication processes for integrated circuit technology

-- RECOMMENDED OR REQUIRED READING

1. Cui, Z.,Nanofabrication: Principles,Capabilites and Limits, Springer, ISBN: 978-0-387-75576- 2, 2008. 2. Bhusban, B., Springer Handbook of Nanotechnology, Springer, ISBN: 978-3-540-29855-7, 2007. 3. Jackson, M.J.,Microfabrication and Nanomanufacturing, CRC Press, ISBN: 0-8247-2431-3, 2006. 4. Gogotsi, Y., Nanotubes and Nanofibers, Taylor & Francis, ISBN 0-8493-9387-6, 2006. 5. Franssila, S., Introduction to Microfabrication, John Wiley & Sons Ltd, ISBN: 0470851058, 2004.

-- PLANNED LEARNING ACTIVITIES AND TEACHING METHODS

Theory Practice Lab. Projects Assign. Other 42 76 30 188 7.5

-- WORK PLACEMENT(S)

Not Applicable

-- ASSESSMENT METHODS AND CRITERIA

	Quantity	Percentage
Mid-terms	1	30
Assignment	2	10
Exercises	0	0
Projects	1	20
Practice	0	0
Quiz	0	0
Contribution of In-term Studies to Overall Grade		40
Contribution of Final Examination to Overall Grade		60

-- WORKLOAD

Efficiency	Total Week Count	Weekly Duration (in hour)	Total Workload in Semester
Theoretical Study Hours of Course Per Week	16	3	48
Practising Hours of Course Per Week	3	2	6
Reading	2	4	8
Searching in Internet and Library	5	5	25
Designing and Applying Materials	3	4	12
Preparing Reports	3	4	12
Preparing Presentation	5	6	30
Presentation	16	2	32
Mid-Term and Studying for Mid-Term	1	1	1
Final and Studying for Final	1	1	1
Other	5	5	25
TOTAL WORKLOAD:			200
TOTAL WORKLOAD / 25:			8
ECTS:			7.5

-- COURSE'S CONTRIBUTION TO PROGRAM

NO	PROGRAM LEARNING OUTCOMES	1	2	3	4	5
1						X
2					X
3						X
4						X
5						X
6					X
7					X
8					X
9				X
10					X
11						X
12					X
13				X
14					X
15					X
16					X
17				X

Gazi University

Information Package

Programme Information

Search

GAZI UNIVERSITY INFORMATION PACKAGE - 2019 ACADEMIC YEAR