GAZI UNIVERSITY INFORMATION PACKAGE - 2019 ACADEMIC YEAR

COURSE DESCRIPTION
MICRO AND NANOPATTERNING TECHNIQUES/5441328
Course Title: MICRO AND NANOPATTERNING TECHNIQUES
Credits 3 ECTS 7.5
Semester 1 Compulsory/Elective Elective
COURSE INFO
 -- LANGUAGE OF INSTRUCTION
  Turkish
 -- NAME OF LECTURER(S)
  Professor Elif Orhan
 -- WEB SITE(S) OF LECTURER(S)
  http://websitem.gazi.edu.tr/site/eliforhan
 -- EMAIL(S) OF LECTURER(S)
  eliforhan@gazi.edu.tr
 -- LEARNING OUTCOMES OF THE COURSE UNIT
Ability to use technical /modern materials to be required in her/his works
Ability to present oral and written forms in her/his field
Ability to work on interdisciplinary studies
Ability to rapidly distinguish the true an required knowledge
Ability to do analyze of results




 -- MODE OF DELIVERY
  Face to face
 -- PREREQUISITES AND CO-REQUISITES
  There is no prerequisite for this course
 -- RECOMMENDED OPTIONAL PROGRAMME COMPONENTS
  There is no recommended optional programme component for this cours.
 --COURSE CONTENT
1. Week  Introduction to Nanosystems and Nanodevices: Fabrication from micro- to nanotechnology
2. Week  Introduction to Nanosystems and Nanodevices: Fabrication from micro- to nanotechnology
3. Week   Photolithography
4. Week  Photomask technology
5. Week  Soft lithography, nanoimprint method
6. Week  Interference lithography
7. Week  Midterm Exam
8. Week  Immersion lithography
9. Week  E-beam lithography
10. Week  Nano-templates by FIB (Focus Ion Beam)
11. Week  X-ray lithography
12. Week  Plasmon lithography
13. Week  Nano-fabrication by self-assembly
14. Week  Direct writing lithography,Dip-pen nanolithography
15. Week  A unique example on nano-fabrication: Nano-fabrication processes for integrated circuit technology
16. Week  A unique example on nano-fabrication: Nano-fabrication processes for integrated circuit technology
 -- RECOMMENDED OR REQUIRED READING
  1. Cui, Z.,Nanofabrication: Principles,Capabilites and Limits, Springer, ISBN: 978-0-387-75576- 2, 2008. 2. Bhusban, B., Springer Handbook of Nanotechnology, Springer, ISBN: 978-3-540-29855-7, 2007. 3. Jackson, M.J.,Microfabrication and Nanomanufacturing, CRC Press, ISBN: 0-8247-2431-3, 2006. 4. Gogotsi, Y., Nanotubes and Nanofibers, Taylor & Francis, ISBN 0-8493-9387-6, 2006. 5. Franssila, S., Introduction to Microfabrication, John Wiley & Sons Ltd, ISBN: 0470851058, 2004.
 -- PLANNED LEARNING ACTIVITIES AND TEACHING METHODS
  Theory Practice Lab. Projects Assign. Other 42 76 30 188 7.5
 -- WORK PLACEMENT(S)
  Not Applicable
 -- ASSESSMENT METHODS AND CRITERIA
 
Quantity
Percentage
 Mid-terms
1
30
 Assignment
2
10
 Exercises
0
0
 Projects
1
20
 Practice
0
0
 Quiz
0
0
 Contribution of In-term Studies to Overall Grade  
40
 Contribution of Final Examination to Overall Grade  
60
 -- WORKLOAD
 Efficiency  Total Week Count  Weekly Duration (in hour)  Total Workload in Semester
 Theoretical Study Hours of Course Per Week
16
3
48
 Practising Hours of Course Per Week
3
2
6
 Reading
2
4
8
 Searching in Internet and Library
5
5
25
 Designing and Applying Materials
3
4
12
 Preparing Reports
3
4
12
 Preparing Presentation
5
6
30
 Presentation
16
2
32
 Mid-Term and Studying for Mid-Term
1
1
1
 Final and Studying for Final
1
1
1
 Other
5
5
25
 TOTAL WORKLOAD: 
200
 TOTAL WORKLOAD / 25: 
8
 ECTS: 
7.5
 -- COURSE'S CONTRIBUTION TO PROGRAM
NO
PROGRAM LEARNING OUTCOMES
1
2
3
4
5
1Ability of comprehension and using of necessary information to identify and solve advanced problems in the field.X
2Ability of supervising and teaching in the stages of collection, implementation, interpretation and dissemination of data related with the field by considering social, scientific, cultural and ethical values.X
3Ability of accessing to information related with scientific and technological developments and continuous renewal.X
4Ability of transmitting of knowledge, skill and experiences in the field to interdisciplinary practice.X
5Evaluation, data analysis and written/oral presentation skills in scientific works.X
6Ability of research topics determination that contributes the literature according to needs of society and industry.X
7Ability of determination of goal and objective, creation of roadmap, planned work for a scientific study.X
8Ability of using the research findings in technological application and/or in directing scientific research subjects.X
9Awareness of legal rights in execution and dissemination of research findings.X
10Effective working skill in disciplinary teams and doing leadership in such teams.X
11Ability of doing original research that contributes to the literature.X
12Ability of bringing innovation in science, application of known method to a new field.X
13Ability of submitting national project proposal and designing of works.X